Achieving atomic resolution
نویسندگان
چکیده
منابع مشابه
Atomic resolution analytical microscopy
It is possible under favorable circumstances to identify composition, bonding, and electronic structure with atomic resolution in microelectronic device structures. In current device structures, where only a few interface atoms can dominate the performance of a device, this can contribute important understanding relevant to product development. This paper is a brief overview of work in our labo...
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It is shown that the ultimate resolution is not limited by the bandwidth of the microscope but by the bandwidth (i.e., the scattering power) of the object. In the case of a crystal oriented along a zone axis, the scattering is enhanced by the channeling of the electrons. However, if the object is aperiodic along the beam direction, the bandwidth is much more reduced. A particular challenge are ...
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ژورنال
عنوان ژورنال: Materials Today
سال: 2002
ISSN: 1369-7021
DOI: 10.1016/s1369-7021(02)05328-2